《半导体加工材料科学》为讨论创新加工、应用和理论研究电子、传感器、探测器、生物技术和绿色能源等实用材料和设备提供了一个独特的场所。 每一期都旨在让读者快速了解各个领域的最新发展、突破性发现和新出现的趋势,包括构成先进半导体加工和应用基础的领域,如微电子学、能源转换和储存、通讯、生物技术、(照片)催化、 纳米和薄膜技术、混合和复合材料、化学处理、气相沉积、器件制造和建模。 亚微米器件的高级光刻技术、蚀刻技术及相关主题、离子注入、损伤演化、快速热处理、高级金属化、薄介电层、氧化、溶胶-凝胶处理等主题将被涵盖。

离散和集成电路的新材料和工艺、磁材料和自旋电子学、异质结构和量子器件、半导体的电和光学特性工程、晶体生长机制、新型非氧化物材料及其应用、(大)分子和杂化材料、分子动力学、ab-i-initio方法、蒙特卡洛方法等。

《半导体加工材料科学》为讨论创新加工、应用和理论研究电子、传感器、探测器、生物技术和绿色能源等实用材料和设备提供了一个独特的场所。

每一期都旨在让读者快速了解各个领域的最新发展、突破性发现和新出现的趋势,包括构成先进半导体加工和应用基础的领域,如微电子学、能源转换和储存、通讯、生物技术、(照片)催化、 纳米和薄膜技术、混合和复合材料、化学处理、气相沉积、器件制造和建模。

亚微米器件用先进光刻技术; 蚀刻及相关课题; 离子注入; 损伤演化及相关问题; 等离子体和热化学气相沉积; 快速热处理; 先进金属化和互连方案; 薄介电层氧化; 溶胶-凝胶处理; 化学浴和(电)化学沉积; 复合半导体半导体加工;新型非氧化物材料及其应用;(大)分子材料和混合材料;和微细制造半导体电和光学性能工程;异质结构和量子器件;离散和集成电路的新材料和工艺;磁性材料和自旋电子学;晶体生长可靠性、缺陷密度、内在杂质和缺陷。

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作者 Zeng Zhuojun

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